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New high resolution negative resist mr-L 6000.1 XP for electron beam and nanoimprint lithography
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- Maximov, Ivan (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Beck, Marc (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Carlberg, Patrick (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Pfeiffer, K. (author)
- Reuther, F. (author)
- Gruetzer, G. (author)
- Schulz, H. (author)
- Wissen, M. (author)
- Scheer, H.-C. (author)
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- (creator_code:org_t)
- 2002
- 2002
- English 2 s.
- In: 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science.
- Conference paper (peer-reviewed)
Abstract
Subject headings
Close
- We present the characterization results of a new high resolution negative electron beam resist mr-L 6000.1 XP. The resist can also be used as imprintable polymer in nanoimprint lithography with sub-100 nm resolution. The feature size achieved after e-beam exposure was about 50 nm with sensitivity of 2-4 μC/cm2. Studies of the resist properties as a function of chemical composition and development conditions are also presented
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- nanoimprint lithography
- high resolution negative resist mr-L 6000.1 XP
- electron beam lithography
- imprintable polymer
- electron beam resolution
- 50 nm
- sensitivity
- chemical composition
- electron beam exposure
Publication and Content Type
- kon (subject category)
- ref (subject category)
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- By the author/editor
- Maximov, Ivan
- Beck, Marc
- Carlberg, Patric ...
- Montelius, Lars
- Pfeiffer, K.
- Reuther, F.
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- Gruetzer, G.
- Schulz, H.
- Wissen, M.
- Scheer, H.-C.
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- About the subject
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- NATURAL SCIENCES
- NATURAL SCIENCES
- and Physical Science ...
- and Condensed Matter ...
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- By the university
- Lund University
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