EXAFS measurements of metal-decorated nanocavities in Si

• This contribution presents a sample preparation methodology to enable the identification, with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates. Preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities are reported. (C) 2002 Elsevier Science B.V. All rights reserved.

Ämnesord

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Nyckelord

voids

gettering

silicon

EXAFS

cavities

Publikations- och innehållstyp

kon (ämneskategori)

ref (ämneskategori)