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Effects of TiN Top ...
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Athle, RobinLund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Nanoelektronik,Forskargrupper vid Lunds universitet,Other operations, LTH,Faculty of Engineering, LTH,Nano Electronics,Lund University Research Groups
(författare)
Effects of TiN Top Electrode Texturing on Ferroelectricity in Hf1-xZrxO2
- Artikel/kapitelEngelska2021
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2021-02-24
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American Chemical Society (ACS),2021
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7 s.
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LIBRIS-ID:oai:lup.lub.lu.se:33d98a1c-29cd-45a5-9aab-2b241da97ada
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https://lup.lub.lu.se/record/33d98a1c-29cd-45a5-9aab-2b241da97adaURI
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https://doi.org/10.1021/acsami.1c01734DOI
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Språk:engelska
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Sammanfattning på:engelska
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Ferroelectric memories based on hafnium oxide are an attractive alternative to conventional memory technologies due to their scalability and energy efficiency. However, there are still many open questions regarding the optimal material stack and processing conditions for reliable device performance. Here, we report on the impact of the sputtering process conditions of the commonly used TiN top electrode on the ferroelectric properties of Hf1-xZrxO2. By manipulating the deposition pressure and chemistry, we control the preferential orientation of the TiN grains between (111) and (002). We observe that (111) textured TiN is superior to (002) texturing for achieving high remanent polarization (Pr). Furthermore, we find that additional nitrogen supply during TiN deposition leads to >5× greater endurance, possibly by limiting the scavenging of oxygen from the Hf1-xZrxO2 film. These results help explain the large Pr variation reported in the literature for Hf1-xZrxO2/TiN and highlights the necessity of tuning the top electrode of the ferroelectric stack for successful device implementation.
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Persson, Anton E.O.Lund University,Lunds universitet,Nanoelektronik,Forskargrupper vid Lunds universitet,Nano Electronics,Lund University Research Groups(Swepub:lu)an3728pe
(författare)
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Irish, AustinLund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Synkrotronljusfysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Synchrotron Radiation Research,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)au4878ir
(författare)
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Menon, HeeraLund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Nanoelektronik,Forskargrupper vid Lunds universitet,Other operations, LTH,Faculty of Engineering, LTH,Nano Electronics,Lund University Research Groups(Swepub:lu)he8157me
(författare)
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Timm, RainerLund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Synkrotronljusfysik,Fysiska institutionen,Institutioner vid LTH,Other operations, LTH,Faculty of Engineering, LTH,Synchrotron Radiation Research,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)slju-ret
(författare)
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Borg, MattiasLund University,Lunds universitet,NanoLund: Centre for Nanoscience,Annan verksamhet, LTH,Lunds Tekniska Högskola,Nanoelektronik,Forskargrupper vid Lunds universitet,Other operations, LTH,Faculty of Engineering, LTH,Nano Electronics,Lund University Research Groups(Swepub:lu)ma3352bo
(författare)
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NanoLund: Centre for NanoscienceAnnan verksamhet, LTH
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Sammanhörande titlar
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Ingår i:ACS applied materials & interfaces: American Chemical Society (ACS)13:9, s. 11089-110951944-82441944-8252
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