Nanoimprint lithography for the fabrication of interdigitated cantilever arrays

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Luo, GangLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH (author)

Nanoimprint lithography for the fabrication of interdigitated cantilever arrays

Article/chapterEnglish2006

Publisher, publication year, extent ...

2006-03-15
IOP Publishing,2006

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LIBRIS-ID:oai:lup.lub.lu.se:3c504f58-f5c0-4573-b1d3-298d76700aad
https://lup.lub.lu.se/record/408531URI
https://doi.org/10.1088/0957-4484/17/8/017DOI

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Language:English
Summary in:English

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SwePubSwePub

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Subject category:art swepub-publicationtype
Subject category:ref swepub-contenttype

Notes

We report on the realization of a novel interdigitated cantilever array with electrostatic control of the shape of the interdigitated array. It consists of an array of SiO2/metal double-finger cantilevers in a grating configuration together with an electrical connection part. The complete grating structure is fabricated with nanoimprint lithography, UV lithography and reactive ion etching. The patterns of the cantilever arrays are defined by nanoimprint lithography. The electrical contact pads are defined and aligned with the imprinted grating pattern by UV lithography. The two steps of reactive ion etching are optimized to get vertical sidewalls of the SiO2 cantilevers and finally to release them from the Si substrate. By applying a bias, the shape of the cantilever array can be altered due to the electrostatic force. The dimensions of the cantilevers and the spacing between them are optimized to achieve the desired functional operating characteristics of the structures. Since the fabrication scheme is based on nanoimprint lithography, such electrostatically controlled periodic structures may be relatively easily and non-expensively realized in various configurations, allowing them to function as optical switching elements, electrical filters, mass sensors, etc.

Subject headings and genre

TEKNIK OCH TEKNOLOGIER Nanoteknik Nanoteknik hsv//swe
ENGINEERING AND TECHNOLOGY Nano-technology Nano-technology hsv//eng

Added entries (persons, corporate bodies, meetings, titles ...)

Maximov, IvanLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-im (author)
Adolph, DavidLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-dad (author)
Graczyk, MariuszLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-mgr (author)
Carlberg, PatrickLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-pca (author)
Ghatnekar-Nilsson, SaraLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)insek-sn (author)
Hessman, DanLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-dhe (author)
Zhu, T (author)
Liu, Z (author)
Xu, HongqiLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-hxu (author)
Montelius, LarsLund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH(Swepub:lu)ftf-lmo (author)
Fasta tillståndets fysikFysiska institutionen (creator_code:org_t)

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In:Nanotechnology: IOP Publishing17:8, s. 1906-19100957-44841361-6528

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By the author/editor: Luo, Gang; Maximov, Ivan; Adolph, David; Graczyk, Mariusz; Carlberg, Patric ...; Ghatnekar-Nilsso ...; show more...; Hessman, Dan; Zhu, T; Liu, Z; Xu, Hongqi; Montelius, Lars; show less...

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ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Nano technology; and Nano technology

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