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Electron-beam mixing of W1 - xSix Si multilayers
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- Vavra, I (author)
- Slovak Academy of Sciences
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- Wallenberg, LR (author)
- Lund University,Lunds universitet,Centrum för analys och syntes,Kemiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Centre for Analysis and Synthesis,Department of Chemistry,Departments at LTH,Faculty of Engineering, LTH
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- Kudryashov, VA (author)
- Institute of Microelectronics and High-Purity Materials, Russian Academy of Sciences
- (creator_code:org_t)
- 1995
- 1995
- English 2 s.
- In: Vacuum. - 0042-207X. ; 46:8-10, s. 1063-1064
- Journal article (peer-reviewed)
Abstract
Subject headings
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- The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
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- ref (subject category)
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