Next generation nanotechnologies for sensor array fabrication

• New emerging technologies such as nanoimprint lithography (NIL) offers the biosensor research community the possibility to fabricate low-cost biodevices having nanometer dimensions. Such nanosized devices can be applied as biosensors where new functions might emerge due to the nanoscale dimensions. In this paper we will discuss various nanolithography methods as well as the benefits of going to the nanoscale for biosensor applications. We will also show results from mixed NIL and UV-lithography for fabrication of interdigitated nanobiosensor electrodes on up to 6'' large Si wafers. The electrode and inter-electrode distances were 100 nm wide over a total area of 200 μm×200 μm. We will also show the obtained enhanced efficiency of redox-recycling when utilizing such nanoscaled biosensors

Subject headings

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Keyword

interelectrode distances

Si wafers

interdigitated nanobiosensor electrodes

UV lithography

nanolithography

nanosized devices

nanometer dimensions

low cost biodevices

biosensor

nanoimprint lithography

sensor array fabrication

nanotechnology

Si

SiO2-Si

100 nm

200 micron

6 inch

redox recycling

Publication and Content Type

kon (subject category)

ref (subject category)