WFRF:(Beck Marc)
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Nanoimprint in mr-L 6000.1 XP/PMMA resist system
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- Carlberg, Patrick (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Beck, Marc (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Graczyk, Mariusz (author)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Pfeiffer, K. (author)
- Reuther, F. (author)
- Gruetzner, G. (author)
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- (creator_code:org_t)
- 2002
- 2002
- English 2 s.
- In: 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science.
- Conference paper (peer-reviewed)
Abstract
Subject headings
Close
- Use of the new resist system mr-L 6000.1 XP in combination with PMMA is demonstrated to give sub-100 nm resolution in nanoimprint lithography. Low glass transition temperature in combination with high plasma stability makes this resist suitable for achieving desirable resist profiles after the imprint process. Imprint conditions for mr-L 6000.1 XP/PMMA resist system as well as imprint results are described and discussed
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- resist profiles
- plasma stability
- glass transition temperature
- nanoimprint lithography
- XP/PMMA resist system
- 100 nm
- SEM
- scanning electron microscopy
Publication and Content Type
- kon (subject category)
- ref (subject category)
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- Carlberg, Patric ...
- Beck, Marc
- Graczyk, Mariusz
- Maximov, Ivan
- Sarwe, Eva-Lena
- Montelius, Lars
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- Pfeiffer, K.
- Reuther, F.
- Gruetzner, G.
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- About the subject
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- NATURAL SCIENCES
- NATURAL SCIENCES
- and Physical Science ...
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- By the university
- Lund University
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