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Spinodal Decomposit...
Spinodal Decomposition of Ti0.33Al0.67N Thin Films Studied by Atom Probe Tomography
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- Johnson, Lars, 1983- (författare)
- Linköpings universitet,Tunnfilmsfysik
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- Thuvander, Mattias (författare)
- Dept. of Applied Physics, Chalmers University of Technology
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- Stiller, Krystyna (författare)
- Dept. of Applied Physics, Chalmers University of Technology
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(creator_code:org_t)
- Engelska.
- Relaterad länk:
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https://urn.kb.se/re...
Abstract
Ämnesord
Stäng
- The decomposition of Ti0.33Al0.67N thin films deposited by cathodic arc evaporation have been studied by atom probe tomography. As-deposited films were found to deviate slightly from a random solid solution, and so be in the earliest stage of decomposition. After annealing at 900 °C for 2 h the films exhibited a spinodally decomposed nanostructure, in an intermediate stage. N was found to preferentially segregate to the Al-rich domains in the annealed sample, causing the TiN-domains to be understoichiometric. A possible Kirkendall effect was detected for the annealed sample, with a modulation of the local stoichiometry by 1-2 at. % along the decomposition gradient.
Nyckelord
- thin films
- TiAlN
- cathodic arc evaporation
- atom probe tomography
- spinodal decomposition
- NATURAL SCIENCES
- NATURVETENSKAP
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