Multi-surface phase-shifting algorithm using the window function fitted by the nonlinear least squares method

• A multi-surface phase demodulation algorithm is proposed to measure surfaces of the transparent plate simultaneously. A non-linear least-squares method based on the trust region is utilized to fit the window function derived from the characteristic polynomials. The fitted window function requires fewer parameters and has a flexible form, which means the window length can be stretched freely and used flexibly. Then, a multi-surface phase demodulation technique combining the discrete Fourier principle and the fitted window function is investigated, allowing simultaneous reconstruction of the measured front surface, rear surface, and thickness variation. During the implementation of our algorithm, the processing time for the interferograms with 850x850 pixels is around 5.1s. Measurement errors caused by several factors are analyzed, including wavelength-tuning error, frequency order error, cavity length error, and average thickness error. The experimental result on a rectangular transparent plate further verifies the effectiveness of our algorithm.

Ämnesord

NATURVETENSKAP  -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)

Nyckelord

Interferometry; wavelength-tuning; fitting algorithm; non-linear least-squares; error analysis

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)