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  • Huang, Tongde,1985Chalmers tekniska högskola,Chalmers University of Technology (author)

Low-Pressure-Chemical-Vapor-Deposition SiNx Passivated AlGaN/GaN HEMTs for Power Amplifier Application

  • Article/chapterEnglish2015

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  • 2015

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  • LIBRIS-ID:oai:research.chalmers.se:01e952f3-9d29-4894-b750-ddc7ff44955b
  • ISBN:9781479987672
  • https://research.chalmers.se/publication/243074URI
  • https://doi.org/10.1109/APMC.2015.7413558DOI

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  • Language:English
  • Summary in:English

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  • Subject category:kon swepub-publicationtype
  • Subject category:ref swepub-contenttype

Notes

  • A Low-Pressure-Chemical-Vapor-Deposition (LPCVD) bilayer SiNx passivation scheme has been investigated and developed, which effectively suppress the current collapse in AlGaN/GaN HEMTs. Low current slump is very helpful for microwave power amplifier application. Compared to in-situ SiNx passivations by metal-organic-chemical-vapor-deposition (MOCVD) and ex-situ SiNx passivations by plasma-enhanced-chemical-vapor-deposition (PECVD), the LPCVD SiNx exhibits the quickest recovery time from double-sweep IV curves. From pulsed IV and load-pull measurements, LPCVD SiNx is also confirmed to deliver superior large signal performance. The bilayer LPCVD SiNx passivated device shows negligible current slump (

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  • Axelsson, Olle,1986Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)ollea (author)
  • Malmros, Anna,1977Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)e6annam (author)
  • Bergsten, Johan,1988Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)johberg (author)
  • Gustafsson, Sebastian,1990Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)sebgus (author)
  • Thorsell, Mattias,1982Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)thorsell (author)
  • Rorsman, Niklas,1964Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)rorsman (author)
  • Chalmers tekniska högskola (creator_code:org_t)

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  • In:2015 Asia-Pacific Microwave Conference (Apmc), Vols 1-339781479987672

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