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Charging phenomena at the interface between high-k dielectrics and SiOx interlayers

Engström, Olof, 1943 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Raeissi, Bahman, 1979 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Piscator, Johan, 1977 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Mitrovic, I. Z. (author)
Hall, S. (author)
Gottlob, H. D. B. (author)
Schmidt, M. (author)
Hurley, P.K. (author)
Cherkaoui, K. (author)
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 (creator_code:org_t)
2009
2009
English.
In: 8th Symposium Diagnostics & Yield Advanced Silicon Devices and Technologies for the ULSI Era, Warsaw, June 22 - 24, 2009 (Invited).
  • Conference paper (peer-reviewed)
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TEKNIK OCH TEKNOLOGIER  -- Annan teknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Övrig annan teknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)

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