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InGaAs/InAlAs/AlAs Heterostructure Barrier Varactors on Silicon Substrate
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- Tavakoli Dastjerdi, Mohammad Hadi, 1984 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Sanz-Velasco, Anke, 1971 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Vukusic, Josip, 1972 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Kollberg, Erik, 1937 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Sadeghi, Mahdad, 1964 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Stake, Jan, 1971 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- 2011
- 2011
- Engelska.
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Ingår i: IEEE Electron Device Letters. - 0741-3106 .- 1558-0563. ; 32:2, s. 140-142
- Relaterad länk:
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http://publications.... (primary) (free)
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https://research.cha...
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https://doi.org/10.1...
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Abstract
Ämnesord
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- We present the results of a study on epitaxial transferof InP-based heterostructure barrier varactor (HBV) materials onto a silicon substrate employing the low-temperature plasma activated bonding technique. The test diodes fabricated on the bonded samples exhibit symmetric electrical characteristics, over the temperature range of 25 ˚C–165 ˚C, and show no degradation compared to previously reported InP-based diodes. Moreover, the onset temperature for debonding, the effective barrier height extracted from the measured data, and the maximum voltage of the HBVs for a current density of 100 A/cm2 were extracted to be 260 ˚C, 0.56 eV, and 10.5 V, respectively.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- III–V semiconductors.
- Epitaxial transfer
- wafer bonding
- integrated circuits
- millimeter wave devices
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- ref (ämneskategori)
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