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Microshutters for M...
Microshutters for MEMS-based time-of-flight measurements in space
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- Brinkfeldt, Klas (författare)
- RISE,IVF
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- Enoksson, Peter, 1957 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Wieser, M. (författare)
- Institutet for rymdfysik (IRF),The Swedish Institute of Space Physics (IRF),Swedish Institute of Space Physics
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- Barabash, S. (författare)
- Institutet for rymdfysik (IRF),The Swedish Institute of Space Physics (IRF),Swedish Institute of Space Physics
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- Emanuelsson, M. (författare)
- Institutet for rymdfysik (IRF),The Swedish Institute of Space Physics (IRF),Swedish Institute of Space Physics
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(creator_code:org_t)
- ISBN 9781424496327
- 2011
- 2011
- Engelska.
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Ingår i: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - 1084-6999. - 9781424496327 ; , s. 597-600
- Relaterad länk:
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http://dx.doi.org/10...
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http://ieeexplore.ie...
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https://research.cha...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-of-flight (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
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- ref (ämneskategori)
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