Design, fabrication and measurements with a UV Linear-Variable Optical Filter microspectrometer

Emadi, A.Technische Universiteit Delft,Delft University of Technology (TU Delft) (författare)

An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

Wu, H.Technische Universiteit Delft,Delft University of Technology (TU Delft) (författare)
De Graaf, G.Technische Universiteit Delft,Delft University of Technology (TU Delft) (författare)
Enoksson, Peter,1957Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)enok (författare)
Correia, J. H.Universidade do Minho,University of Minho (författare)
Wolffenbuttel, R. F.Technische Universiteit Delft,Delft University of Technology (TU Delft) (författare)
Technische Universiteit DelftChalmers tekniska högskola (creator_code:org_t)

Ingår i:Proceedings of SPIE - The International Society for Optical Engineering: SPIE8439, s. Art. no. 84390V-0277-786X1996-756X9780819491312

Av författaren/redakt...: Emadi, A.; Wu, H.; De Graaf, G.; Enoksson, Peter, ...; Correia, J. H.; Wolffenbuttel, R ...

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