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Design, fabrication...
Design, fabrication and measurements with a UV Linear-Variable Optical Filter microspectrometer
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- Emadi, A. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Wu, H. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- De Graaf, G. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Correia, J. H. (author)
- Universidade do Minho,University of Minho
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- Wolffenbuttel, R. F. (author)
- Technische Universiteit Delft,Delft University of Technology (TU Delft)
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(creator_code:org_t)
- ISBN 9780819491312
- SPIE, 2012
- 2012
- English.
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In: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9780819491312 ; 8439, s. Art. no. 84390V-
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Abstract
Subject headings
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- An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Linear Variable Filter
- UV spectrometer
- Microspectrometer
Publication and Content Type
- kon (subject category)
- ref (subject category)
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