WFRF:(Sanz Velasco Anke 1971)
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Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding
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- Bring, Martin, 1977 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Sanz-Velasco, Anke, 1971 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
- Rödjegård, Henrik, 1974 (author)
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- (creator_code:org_t)
- 2002
- 2002
- English.
- In: Proceedings of the 13th Micromechanics Europe workshop 2002, MME´02 Sinaia, Romania.
- Conference paper (peer-reviewed)
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- ref (subject category)
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