WFRF:(Bengtsson Stefan 1961)
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- Amirfeiz, Petra,1973Chalmers tekniska högskola,Chalmers University of Technology (author)
Formation of silicon structures by plasma activated wafer bonding
- Article/chapterEnglish2001
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- 2001
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- LIBRIS-ID:oai:research.chalmers.se:26696493-1f49-4d5b-99ae-cacabb7275f5
- https://research.chalmers.se/publication/17801URI
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- Language:English
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- Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)stefanb (author)
- Bergh, Mats,1968Chalmers tekniska högskola,Chalmers University of Technology (author)
- Zanghellini, Ezio,1962Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)zanghell (author)
- Börjesson, Lars,1957Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)lborje (author)
- Chalmers tekniska högskola (creator_code:org_t)
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- In:Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings99, s. 29-39
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