Sökning: WFRF:(Anderson Per)
> (2020-2023) >
Enhanced Electrode ...
Enhanced Electrode Deposition for On-Chip Integrated Micro-Supercapacitors by Controlled Surface Roughening
-
- Vyas, Agin, 1992 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Wang, Kejian (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Anderson, Alec (författare)
- University of California
-
visa fler...
-
- Velasco, Andres (författare)
- Katholieke Universiteit Leuven,Chalmers tekniska högskola,Chalmers University of Technology
-
- Van Den Eeckhoudt, Ruben (författare)
- Katholieke Universiteit Leuven,Chalmers tekniska högskola,Chalmers University of Technology
-
- Haque, Mohammad Mazharul, 1984 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Li, Qi, 1990 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Smith, Anderson David, 1985 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Lundgren, Per, 1968 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Enoksson, Peter, 1957 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
visa färre...
-
(creator_code:org_t)
- 2020-03-06
- 2020
- Engelska.
-
Ingår i: ACS Omega. - : American Chemical Society (ACS). - 2470-1343. ; 5:10, s. 5219-5228
- Relaterad länk:
-
https://research.cha... (primary) (free)
-
visa fler...
-
https://pubs.acs.org...
-
https://doi.org/10.1...
-
https://research.cha...
-
visa färre...
Abstract
Ämnesord
Stäng
- On-chip micro-supercapacitors (MSCs), integrated with energy harvesters, hold substantial promise for developing self-powered wireless sensor systems. However, MSCs have conventionally been manufactured through techniques incompatible with semiconductor fabrication technology, the most significant bottleneck being the electrode deposition technique. Utilization of spin-coating for electrode deposition has shown potential to deliver several complementary metal-oxide-semiconductor (CMOS)-compatible MSCs on a silicon substrate. Yet, their limited electrochemical performance and yield over the substrate have remained challenges obstructing their subsequent integration. We report a facile surface roughening technique for improving the wafer yield and the electrochemical performance of CMOS-compatible MSCs, specifically for reduced graphene oxide as an electrode material. A 4 nm iron layer is deposited and annealed on the wafer substrate to increase the roughness of the surface. In comparison to standard nonroughened MSCs, the increase in surface roughness leads to a 78% increased electrode thickness, 21% improvement in mass retention, 57% improvement in the uniformity of the spin-coated electrodes, and a high yield of 87% working devices on a 2″ silicon substrate. Furthermore, these improvements directly translate to higher capacitive performance with enhanced rate capability, energy, and power density. This technique brings us one step closer to fully integrable CMOS-compatible MSCs in self-powered systems for on-chip wireless sensor electronics. ©
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
Hitta via bibliotek
Till lärosätets databas
- Av författaren/redakt...
-
Vyas, Agin, 1992
-
Wang, Kejian
-
Anderson, Alec
-
Velasco, Andres
-
Van Den Eeckhoud ...
-
Haque, Mohammad ...
-
visa fler...
-
Li, Qi, 1990
-
Smith, Anderson ...
-
Lundgren, Per, 1 ...
-
Enoksson, Peter, ...
-
visa färre...
- Om ämnet
-
- NATURVETENSKAP
-
NATURVETENSKAP
-
och Kemi
-
och Oorganisk kemi
-
- NATURVETENSKAP
-
NATURVETENSKAP
-
och Kemi
-
och Materialkemi
-
- TEKNIK OCH TEKNOLOGIER
-
TEKNIK OCH TEKNO ...
-
och Elektroteknik oc ...
-
och Annan elektrotek ...
- Artiklar i publikationen
-
ACS Omega
- Av lärosätet
-
Chalmers tekniska högskola