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Interface defects in HfO2, LaSiOx and Gd2O3 high-k/metal gate structures on silicon: Energy distribution and passivation

Hurley, P.K. (author)
Cherkaoui, K. (author)
O'Connor, E (author)
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Groenland, A.W. (author)
Lemme, M.C. (author)
Gottlob, H.D.B. (author)
Schmidt, M (author)
Hall, S. (author)
Lu, Y. (author)
Buiu, O. (author)
Raeissi, Bahman, 1979 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Piscator, Johan, 1977 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Engström, Olof, 1943 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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 (creator_code:org_t)
2007
2007
English.
In: Proc. Electrochemical Society Meeting, Washington DC, October 2007.
  • Conference paper (peer-reviewed)
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TEKNIK OCH TEKNOLOGIER  -- Annan teknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies (hsv//eng)

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