Synthesis of carbon nanotube films by thermal CVD in the presence of supported catalyst particles. Part I: The silicon substrate/nanotube film interface

Yao, Yiming,1957Chalmers tekniska högskola,Chalmers University of Technology (author)

The interface between the silicon substrate and a carbon nanotube film grown by thermal CVD with acetylene (C2H2) and hydrogen at 750 or 900 °C has been characterized by high resolution and analytical transmission electron microscopy, including electron spectroscopic imaging. Silicon (0 0 2) substrates coated with a thin (2.8 nm) iron film were heat treated in the CVD furnace at the deposition temperature in a mixture of flowing argon and hydrogen whereby nanosized particles of (Fe,Si)3O4 formed. These particles were reduced to catalytic iron silicides with the α–(Fe, Si), α2–Fe2Si and α1–Fe2Si structures during CVD at 900 °C, and multi-wall carbon nanotubes grew from supported particles via a base-growth mechanism. A limited number of intermediate iron carbides, hexagonal and orthorhombic Fe7C3, were also present on the substrate surface after CVD at 900 °C. The reduction of the preformed (Fe, Si)3O4 particles during thermal CVD at 750 °C was accompanied by disintegration leading to the formation of a number of smaller (

Falk, Lena,1956Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)lklfalk (author)
Morjan, Raluca Elena,1976Chalmers tekniska högskola,Chalmers University of Technology (author)
Nerushev, O.A.Chalmers tekniska högskola,Chalmers University of Technology (author)
Campbell, Eleanor E.B.1960Chalmers tekniska högskola,Chalmers University of Technology (author)
Chalmers tekniska högskola (creator_code:org_t)

By the author/editor: Yao, Yiming, 195 ...; Falk, Lena, 1956; Morjan, Raluca E ...; Nerushev, O.A.; Campbell, Eleano ...

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Chemical Enginee ...; and Chemical Process ...

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Materials Engine ...; and Other Materials ...

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

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