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- Bengtsson, Stefan,1961Chalmers tekniska högskola,Chalmers University of Technology (author)
The influence of wafer dimensions on the contact wave velocity in silicon wafer bonding
- Article/chapterEnglish1996
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- 1996
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- LIBRIS-ID:oai:research.chalmers.se:3ede402e-bb29-46c0-80af-b0330f8efa3a
- https://research.chalmers.se/publication/17727URI
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- Language:English
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- Ljungberg, Karin (author)
- Vedde, Jan (author)
- Chalmers tekniska högskola (creator_code:org_t)
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- In:Applied Physics Letters69:22, s. 3381-3383
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