Integrated MEMS-tunable VCSELs with high modulation bandwidth

• The modulation bandwidth of micromachined tunable VCSELs is typically limited by the parasitic capacitance associated with the large mesa platform for the movable mirror. Presented is a simple technology for wafer-scale integration of tunable VCSELs with low mesa capacitance and high modulation bandwidth. Small signal measurements show a 3dB bandwidth of up to 6 GHz over a tuning range of 18 nm. Digital modulation is demonstrated with error-free data transmission at 5 Gbit/s and eye diagrams at 10 Gbit/s.

Subject headings

NATURVETENSKAP  -- Fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences (hsv//eng)

Publication and Content Type

art (subject category)

ref (subject category)