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Transparent Ru–Si–O...
Transparent Ru–Si–O/In–Ga–Zn–O MESFETs on flexible polymer substrates
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Kaczmarski, J. (författare)
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- Taube, A. (författare)
- Politechnika Warszawska,Warsaw University of Technology
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Borysiewicz, M. A. (författare)
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- Mysliwiec, Marcin (författare)
- Politechnika Warszawska,Warsaw University of Technology
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Piskorski, Krzysztof (författare)
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- Stiller, Krystyna Marta, 1947 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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Kaminska, E. (författare)
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(creator_code:org_t)
- 2018
- 2018
- Engelska.
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Ingår i: IEEE Transactions on Electron Devices. - 1557-9646 .- 0018-9383. ; 65:1, s. 129-135
- Relaterad länk:
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https://doi.org/10.1...
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https://research.cha...
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Abstract
Ämnesord
Stäng
- With the development of novel device applications, e.g., in the field of Internet of Things or point-of-care personalized diagnostic systems, came an increased demand for MESFETs for fast and low-power consumption integrated circuits and active-matrix displays. In this paper, we present fabrication and characterization of transparent Ru–Si–O/In–Ga–Zn–O MESFETs on flexible substrates. The use of transparent conducting oxide, namely, Ru–Si–O, as Schottky gate electrode, allows for processing the devices at room temperature, enabling the utilization of such low-temperature substrates as polyethylene terephthalate foil and paper. It was shown that tuning the device geometry allows realization of transistors providing on-current up to 2 mA, while the highest on-to-off current ratio equals 2 × 105, with off-current below 1 nA, carrier mobility in the channel exceeds 9 cm2·V−1·s−1, and subthreshold swing is below 250 mV·decade−1
Ämnesord
- NATURVETENSKAP -- Data- och informationsvetenskap -- Medieteknik (hsv//swe)
- NATURAL SCIENCES -- Computer and Information Sciences -- Media and Communication Technology (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Kommunikationssystem (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Communication Systems (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Amorphous In–Ga–Zn–O (a-IGZO)
- MESFETs
- Schottky barrier
- Ru–Si–O
- Transparent amorphous oxide semiconductors (TAOSs)
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