Multi-parameter estimation of high-Q silicon rich nitride resonators using optical frequency domain reflectometry

• Many linear and nonlinear optics applications rely on micro-resonators (MRRs) with carefully designed dispersion and coupling rate coefficients. These parameters are however challenging to measure for MRRs based on high-confinement optical waveguides. In this paper, we report on the use of optical frequency domain reflectometry (OFDR) for the measurement of group velocity dispersion (GVD), coupling coefficients and round-Trip loss, in high-Q (Q i ∼ 0.3 × 10 6 ) silicon-rich nitride MRRs. This technique allows for retrieving the GVD coefficients, intrinsic losses and coupling coefficients for each transverse mode in the resonator, thus providing very valuable feed-back information from experiments to the design flow step.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Medicinteknik -- Medicinsk laboratorie- och mätteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Medical Engineering -- Medical Laboratory and Measurements Technologies (hsv//eng)

NATURVETENSKAP  -- Fysik -- Annan fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Other Physics Topics (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

Integrated photonics

Time domain response

OFDR

Optical metrology

Interferometry

Group velocity dispersion

Frequency comb

High-Q microring resonator

Publication and Content Type

kon (subject category)

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