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Effect of the misor...
Effect of the misorientation of the 4H-SiC substrate on the open volume defects in GaN grown by metal-organic chemical vapor deposition
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- Tengborn, Elisabeth, 1978 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Rummukainen, M (author)
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Tuomisto, F. (author)
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Saarinen, K. (author)
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Rudzinski, M. (author)
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Hageman, P. R. (author)
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Larsen, P.K. (author)
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- Nordlund, Anders, 1964 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- 2006
- 2006
- English.
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In: Applied Physics Letters. ; 89:091905, s. 3-
- Related links:
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Abstract
Subject headings
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- Positron annihilation spectroscopy has been used to study GaN grown by metal-organic chemical vapor deposition on misoriented 4H-SiC substrates. Two kinds of vacancy defects are observed: Ga vacancies and larger vacancy clusters in all the studied layers. In addition to vacancies, positrons annihilate at shallow traps that are likely to be dislocations. The results show that the vacancy concentration increases and the shallow positron trap concentration decreases with the increasing substrate misorientation.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Annan teknik -- Övrig annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)
Keyword
- semiconductor growth
- MOCVD
- vacancies (crystal)
- wide band gap semiconductors
- positron annihilation
- dislocations
- III-V semiconductors
- gallium compounds
Publication and Content Type
- art (subject category)
- ref (subject category)
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