WFRF:(Sanz Velasco Anke 1971)
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Wafer bonding for MEMS
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
- Rusu, Cristina (author)
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- Sanz-Velasco, Anke, 1971 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- (creator_code:org_t)
- 2005
- 2005
- English.
- In: Proceeding of the 9th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applic, Canadaations, Quebec City.
- Conference paper (peer-reviewed)
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- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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