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Integrated Tunable VCSELs With Simple MEMS Technology
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- Kögel, Benjamin, 1979 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Abbaszadehbanaeiyan, Amin, 1983 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Westbergh, Petter, 1981 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- (creator_code:org_t)
- ISBN 9781424456833
- 2010
- 2010
- English.
- In: Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International. - 0899-9406. - 9781424456833
- Conference paper (peer-reviewed)
Abstract
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- A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-resist droplets serve as preform for making curved movable micro-mirrors. First devices show a tuning range of 15 nm with mW-output power.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Telekommunikation (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Telecommunications (hsv//eng)
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