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Hybrid-mounted micromachined aluminum hotwires for wall shear stress measurements

Haasl, Sjoerd (author)
Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)
Mucha, Dirk (author)
Fraunhofer-Institut fur Produktionsanlagen und Konstruktionstechnik,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)
Chernoray, Valery, 1975 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Ebefors, Thorbjörn (author)
Silex Microsystems AB,Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)
Enoksson, Peter, 1957 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Löfdahl, Lennart, 1948 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Stemme, Göran (author)
Kungliga Tekniska Högskolan (KTH),Royal Institute of Technology (KTH)
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 (creator_code:org_t)
2005
2005
English.
In: Journal of Microelectromechanical Systems. - 1057-7157. ; 14:2, s. 254-260
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor. © 2005 IEEE.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Reglerteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Control Engineering (hsv//eng)

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