MICORMACHINED MULTILAYER SU8 DOUBLE-SIDED PIN-FLANGE ADAPTER FOR 220-325 GHZ

• We present the first double-sidedpin-flange adapter for 220 ? 325 GHz solely madeout of gold covered multilayered SU8. The processis based on exposing layers with different patternsrealizing openings through both layers and pinstructures in only one of the layers. Each processgives two layers which are then bonded back toback resulting in a four layer device. SU8 has thebenefit of being cheap and robust compared to Siand is useful for applications where the device willbe handled by hand and could be exposed to unevenforces. The multilayer SU8 double-sided pin-flangeadapter was successfully fabricated. Measurementsand evaluations will be presented at the conference.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)

Publication and Content Type

kon (subject category)

ref (subject category)