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Highly effective tr...
Highly effective transfer of micro-LED pixels to the intermediate and rigid substrate with weak and tunable adhesion by thiol modification
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- Pan, Kui (author)
- Fuzhou University
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- Sun, Jie, 1977 (author)
- Fuzhou University,Chalmers tekniska högskola,Chalmers University of Technology
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- Lin, Chang (author)
- Fuzhou University
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- Deng, Liying (author)
- Fuzhou University
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- Li, Xiao (author)
- Fuzhou University
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- Mao, Zuodong (author)
- Fuzhou University
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Yang, Tianxi (author)
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Huang, Zhonghang (author)
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- Li, Yang (author)
- Fuzhou University
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- Nie, Junyang (author)
- Xi'an Jiaotong University
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- Guo, Tailiang (author)
- Fuzhou University
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- Yan, Qun (author)
- Fuzhou University
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(creator_code:org_t)
- 2023
- 2023
- English.
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In: Nanoscale. - : Royal Society of Chemistry (RSC). - 2040-3372 .- 2040-3364. ; 15:9, s. 4420-4428
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https://doi.org/10.1...
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Abstract
Subject headings
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- Based on transfer printing technology, micro-LED pixels can be transferred to different types and sizes of driving substrates to realize displays with different application scenarios. To achieve a successful transfer, GaN-based micro-LEDs first need to be separated from the original epitaxial substrate. Here, micro-LED pixels (each size 25 μm × 30 μm) on the sapphire substrate were transferred to a flexible semiconductor wafer processing (SWP) tape that is strongly sticky by conventional laser lift-off (LLO) techniques. The pixels on the SWP tape were then transferred by using a sacrificial layer of non-crosslinked oligomeric polystyrene (PS) film onto the intermediate and rigid substrate (IRS) with weak and tunable adhesion by thiol (-SH) modification. The electrode of the micro-LED is Au metal, which forms Au-S bonds with the surface of the IRS to fix the pixels. The rigid substrate helps ensure that the pixel spacing is almost unchanged during the stamp transfer process, and the weak and tunable adhesion facilitates the pixels being picked up by the stamp. The experimental results demonstrate that the pixels can be efficiently transferred to the IRS by LLO and sacrificial layer-assistance, which will provide the possibility of achieving the further transfer of pixels to different types and sizes of driving substrates by a suitable transfer stamp. The transfer process details are discussed, which can provide insights into the transfer of micro-nano devices through polymer sacrificial layers.
Subject headings
- NATURVETENSKAP -- Kemi -- Polymerkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Polymer Chemistry (hsv//eng)
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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Nanoscale
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To the university's database
- By the author/editor
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Pan, Kui
-
Sun, Jie, 1977
-
Lin, Chang
-
Deng, Liying
-
Li, Xiao
-
Mao, Zuodong
-
show more...
-
Yang, Tianxi
-
Huang, Zhonghang
-
Li, Yang
-
Nie, Junyang
-
Guo, Tailiang
-
Yan, Qun
-
show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Polymer Chemistr ...
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Materials Chemis ...
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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Nanoscale
- By the university
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Chalmers University of Technology