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Wafer Bonding Induced Degradation Of Thermal Silicon Dioxide Layers On Silicon

Afanasev, V. V. (author)
Ericsson, Per, 1968 (author)
Chalmers tekniska högskola,Chalmers University of Technology
Bengtsson, Stefan, 1961 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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Andersson, Mats O., 1963 (author)
Chalmers tekniska högskola,Chalmers University of Technology
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 (creator_code:org_t)
1995
1995
English.
In: Applied Physics Letters. ; 66:13, s. 1653-1655
  • Journal article (peer-reviewed)
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TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

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Afanasev, V. V.
Ericsson, Per, 1 ...
Bengtsson, Stefa ...
Andersson, Mats ...
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ENGINEERING AND TECHNOLOGY
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and Electrical Engin ...
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