(WFRF:(Harper C.))
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Enhanced sputtering of one species in the processing of multielement thin films
- Harper, JME (author)
-
- Berg, Sören (author)
- Uppsala universitet,Fasta tillståndets elektronik
- Nender, C (author)
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- Katardjiev, Ilia V (author)
- Motakef, S (author)
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- (creator_code:org_t)
- 1992
- 1992
- English.
- In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 10:4, s. 1765-
- Journal article (peer-reviewed)
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- art (subject category)
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