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SILICIDE CONTACT FORMATION
- Kellock, A. (author)
- Lavoie, C. (author)
- Ozcan, A. (author)
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- Rossnagel, S. (author)
- Yang, B. (author)
- Zhu, Y. (author)
- Zollner, S. (author)
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- (creator_code:org_t)
- 2010
- English.
- Patent (pop. science, debate, etc.)
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Publication and Content Type
- pop (subject category)
- pat (subject category)
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- Kellock, A.
- Lavoie, C.
- Ozcan, A.
- Rossnagel, S.
- Yang, B.
- Zhu, Y.
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- Zollner, S.
- Zhen, Zhang, 197 ...
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- Uppsala University
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