WFRF:(Buono A)
Search: WFRF:(Buono A) > (2010-2014) > Experimental evalua...
- 1 of 3
- Previous record
- Next record
- To hitlist
Experimental evaluation of different passivation layers on the performance of 3kV 4H-SiC BJTs
-
- Ghandi, Reza (author)
- KTH,Integrerade komponenter och kretsar
-
- Domeij, Martin (author)
- KTH,Integrerade komponenter och kretsar
- Esteve, R. (author)
- show more...
- Schoner, A. (author)
- Han, J. (author)
- Dimitrijev, S. (author)
- Reshanov, S. A. (author)
- show less...
- (creator_code:org_t)
- 2010
- 2010
- English.
- In: Materials Science Forum. - 0255-5476 .- 1662-9752. ; 645-648:Part 1-2, s. 661-664
- Journal article (peer-reviewed)
Abstract
Subject headings
Close
- In this work, the electrical performance in terms of maximum current gain, ON-resistance and blocking capability has been compared for 4H-SiC BJTs passivated with different surface passivation layers. Variation in BJT performance has been correlated to densities of interface traps and fixed oxide charge, as evaluated through MOS capacitors. Six different methods were used to fabricate SiO2 surface passivation on BJT samples from the same wafer. The highest current gain was obtained for PECVD deposited SiO2 which was annealed in N2O ambient at 1100 degrees C during 3 hours. Variations in breakdown voltage for different surface passivations were also found, and this is attributed to differences in fixed oxide charge that can affect the optimum dose of the high voltage JTE termination.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
Keyword
- Surface passivation
- Bipolar Junction Transistors (BJT)
- 4H-SiC
- Materials science
- Teknisk materialvetenskap
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
- Materials Science Forum (Search for host publication in LIBRIS)
To the university's database
- 1 of 3
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Ghandi, Reza
- Domeij, Martin
- Esteve, R.
- Buono, Benedetto
- Schoner, A.
- Han, J.
- show more...
- Dimitrijev, S.
- Reshanov, S. A.
- Zetterling, Carl ...
- Östling, Mikael
- show less...
- About the subject
-
- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
- and Materials Engine ...
- Articles in the publication
- Materials Scienc ...
- By the university
- Royal Institute of Technology
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
