WFRF:(Rehbein M)
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- Holmberg, AndersKTH,Fysik (author)
Nano-fabrication of condenser and micro zone plates for compact X-ray microscopy
- Article/chapterEnglish2004
Publisher, publication year, extent ...
- 2004
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-5982
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-5982URI
- https://doi.org/10.1016/j.mee.2004.03.006DOI
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- Language:English
- Summary in:English
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- QC 20100616, QC 20111017. 29th International Conference on Micro and Nano Engineering (MNE 2003), Cambridge, ENGLAND, SEP 22-25, 2003
- We demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si3N4-membranes using a three-layer resist scheme and 30 keV e-beam lithography in combination with reactive ion etching and nickel electroplating. The process is developed on solely commercially available resists and instruments. As examples, we demonstrate fabrication of micro-zone plates with outermost linewidths of 30 nm and an uniform zone height of 160 nm, and a 4.5 mm diameter condenser zone plate with 50-60 nm lines, fabricated by using stitched fields.
Subject headings and genre
- NATURVETENSKAP Fysik hsv//swe
- NATURAL SCIENCES Physical Sciences hsv//eng
- Physics
- Fysik
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- Rehbein, StefanKTH,Fysik(Swepub:kth)u1lmm9pi (author)
- Hertz, Hans M.KTH,Fysik(Swepub:kth)u10uiefj (author)
- KTHFysik (creator_code:org_t)
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- In:Microelectronic Engineering73/74, s. 639-6430167-93171873-5568
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