Nanoelectromechanical Sensors Based on Suspended 2D Materials

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Sökning: WFRF:(S. J. van der Zant Herre) > (2020) > Nanoelectromechanic...

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Fältnamn	Indikatorer	Metadata
000		03854naa a2200433 4500
001		oai:DiVA.org:kth-278968
003		SwePub
008		200818s2020 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-2789682 URI
024	7	a https://doi.org/10.34133/2020/87486022 DOI
040		a (SwePub)kth
041		a engb eng
042		9 SwePub
072	7	a ref2 swepub-contenttype
072	7	a for2 swepub-publicationtype
100	1	a Lemme, Max C.u Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany.;AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany.4 aut
245	1 0	a Nanoelectromechanical Sensors Based on Suspended 2D Materials
264	1	b AMER ASSOC ADVANCEMENT SCIENCE,c 2020
338		a print2 rdacarrier
500		a QC 20200818
520		a The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
650	7	a NATURVETENSKAPx Fysikx Den kondenserade materiens fysik0 (SwePub)103042 hsv//swe
650	7	a NATURAL SCIENCESx Physical Sciencesx Condensed Matter Physics0 (SwePub)103042 hsv//eng
700	1	a Wagner, Stefanu AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany.4 aut
700	1	a Lee, Kanghou Univ Bundeswehr Munchen, Fac Elect Engn & Informat Technol, Inst Phys, Werner Heisenberg Weg 39, D-85577 Neubiberg, Germany.4 aut
700	1	a Fan, Xugeu KTH,Mikro- och nanosystemteknik4 aut0 (Swepub:kth)u16v405i
700	1	a Verbiest, Gerard J.u Delft Univ Technol, Dept Precis & Microsyst Engn, Mekelweg 2, NL-2628 CD Delft, Netherlands.4 aut
700	1	a Wittmann, Sebastianu Infineon Technol AG, Wernerwerkstr 2, D-93049 Regensburg, Germany.4 aut
700	1	a Lukas, Sebastianu Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany.4 aut
700	1	a Dolleman, Robin J.u Rhein Westfal TH Aachen, Inst Phys 2, Otto Blumenthal Str, D-52074 Aachen, Germany.4 aut
700	1	a Niklaus, Frank,d 1971-u KTH,Mikro- och nanosystemteknik4 aut0 (Swepub:kth)u1bcu8r2
700	1	a van der Zant, Herre S. J.u Delft Univ Technol, Kavli Inst Nanosci, Lorentzweg 1, NL-2628 CJ Delft, Netherlands.4 aut
700	1	a Duesberg, Georg S.u Univ Bundeswehr Munchen, Fac Elect Engn & Informat Technol, Inst Phys, Werner Heisenberg Weg 39, D-85577 Neubiberg, Germany.4 aut
700	1	a Steeneken, Peter G.u Delft Univ Technol, Dept Precis & Microsyst Engn, Mekelweg 2, NL-2628 CD Delft, Netherlands.;Delft Univ Technol, Kavli Inst Nanosci, Lorentzweg 1, NL-2628 CJ Delft, Netherlands.4 aut
710	2	a Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany.;AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany.b AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany.4 org
773	0	t RESEARCHd : AMER ASSOC ADVANCEMENT SCIENCEg 2020q 2020x 2639-5274
856	4	u https://doi.org/10.34133/2020/8748602
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-278968
856	4 8	u https://doi.org/10.34133/2020/8748602

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Av författaren/redakt...: Lemme, Max C.; Wagner, Stefan; Lee, Kangho; Fan, Xuge; Verbiest, Gerard ...; Wittmann, Sebast ...; visa fler...; Lukas, Sebastian; Dolleman, Robin ...; Niklaus, Frank, ...; van der Zant, He ...; Duesberg, Georg ...; Steeneken, Peter ...; visa färre...

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