WFRF:(Standaert T.)
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| Fältnamn | Indikatorer | Metadata |
|---|---|---|
| 000 | 01944naa a2200373 4500 | |
| 001 | oai:DiVA.org:uu-40425 | |
| 003 | SwePub | |
| 008 | 070302s1998 | |||||||||||000 ||eng| | |
| 009 | oai:DiVA.org:miun-31607 | |
| 024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-404252 URI |
| 024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-316072 URI |
| 040 | a (SwePub)uud (SwePub)miun | |
| 041 | a eng | |
| 042 | 9 SwePub | |
| 072 | 7 | a ref2 swepub-contenttype |
| 072 | 7 | a kon2 swepub-publicationtype |
| 100 | 1 | a Schaepkens, M4 aut |
| 245 | 1 0 | a Selective SiOs to Si3N4 etching in inductively coupled fluorocarbon plasmas |
| 264 | 1 | c 1998 |
| 338 | a print2 rdacarrier | |
| 650 | 7 | a TEKNIK OCH TEKNOLOGIERx Elektroteknik och elektronikx Annan elektroteknik och elektronik0 (SwePub)202992 hsv//swe |
| 650 | 7 | a ENGINEERING AND TECHNOLOGYx Electrical Engineering, Electronic Engineering, Information Engineeringx Other Electrical Engineering, Electronic Engineering, Information Engineering0 (SwePub)202992 hsv//eng |
| 653 | a Electronics | |
| 653 | a Elektronik | |
| 700 | 1 | a Standaert, T E F M4 aut |
| 700 | 1 | a Reuger, N R4 aut |
| 700 | 1 | a Oehrlein, G S4 aut |
| 700 | 1 | a Hedlund, Christer,d 1964-u Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap4 aut0 (Swepub:miun)chrhed |
| 700 | 1 | a Blom, Hans-Olofu Uppsala universitet,Institutionen för materialvetenskap,Elektronik,Fasta tillståndets elektronik,Uppsala universitet, Institutionen för materialvetenskap4 aut0 (Swepub:uu)hbl07552 |
| 700 | 1 | a Cook, J M4 aut |
| 710 | 2 | a Uppsala universitetb Institutionen för materialvetenskap4 org |
| 773 | 0 | t The 25th national symposium UNY-VAC, Albany NY |
| 856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-40425 |
| 856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-31607 |
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