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Observations about the formation of thin disilicide films by solid-state metal-silicon interactions: Tantalum

Petersson, CS (author)
Uppsala universitet,Fasta tillståndets elektronik
Baglin, J (author)
d'Heurle, F (author)
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Dempsey, J (author)
Harper, J (author)
Serrano, C (author)
Tsai, MY (author)
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 (creator_code:org_t)
Princeton : Electrochemical Society, 1980
1980
English.
In: Thin Film Interfaces & Interactions. - Princeton : Electrochemical Society. ; , s. 290-
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Petersson, CS
Baglin, J
d'Heurle, F
Dempsey, J
Harper, J
Serrano, C
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Tsai, MY
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