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Understanding the d...
Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides
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- Aiempanakit, Montri, 1977- (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Aijaz, Asim (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Lundin, Daniel (författare)
- Linköpings universitet,KTH,Rymd- och plasmafysik,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Helmersson, Ulf (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Kubart, Tomas (författare)
- Uppsala universitet,Fasta tillståndets elektronik,The Ångström Laboratory, Uppsala University, Uppsala, Sweden
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(creator_code:org_t)
- AIP Publishing, 2013
- 2013
- Engelska.
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 113:13, s. 133302-
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- The discharge current behavior in reactive high power impulse magnetron sputtering (HiPIMS) of Ti-O and Al-O is investigated. It is found that for both metals, the discharge peak current significantly increases in the oxide mode in contrast to the behavior in reactive direct current magnetron sputtering where the discharge current increases for Al but decreases for Ti when oxygen is introduced. In order to investigate the increase in the discharge current in HiPIMS-mode, the ionic contribution of the discharge in the oxide and metal mode is measured using time-resolved mass spectrometry. The energy distributions and time evolution are investigated during the pulse-on time as well as in the post-discharge. In the oxide mode, the discharge is dominated by ionized oxygen, which has been preferentially sputtered from the target surface. The ionized oxygen determines the discharge behavior in reactive HiPIMS.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- Electron-Emission
- Energy
- Bombardment
- Simulation
- Engineering Science with specialization in Electronics
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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