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Are the argon metas...
Are the argon metastables important in high power impulse magnetron sputtering discharges?
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- Gudmundsson, Jon Tomas, 1965- (författare)
- KTH,Rymd- och plasmafysik,KTH Royal Institute Technology, Sweden; University of Iceland, Iceland
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- Lundin, D. (författare)
- University of Paris 11, France
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- Stancu, G. D. (författare)
- CentraleSupelec, France; CNRS, France
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- Brenning, Nils (författare)
- Linköpings universitet,KTH,Rymd- och plasmafysik,Linköping University, Sweden,Plasma och ytbeläggningsfysik,Tekniska fakulteten,KTH Royal Institute Technology, Sweden
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- Minea, T. M. (författare)
- University of Paris 11, France
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(creator_code:org_t)
- American Institute of Physics (AIP), 2015
- 2015
- Engelska.
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Ingår i: Physics of Plasmas. - : American Institute of Physics (AIP). - 1070-664X .- 1089-7674. ; 22:11
- Relaterad länk:
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http://liu.diva-port...
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https://liu.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- We use an ionization region model to explore the ionization processes in the high power impulse magnetron sputtering (HiPIMS) discharge in argon with a titanium target. In conventional dc magnetron sputtering (dcMS), stepwise ionization can be an important route for ionization of the argon gas. However, in the HiPIMS discharge stepwise ionization is found to be negligible during the breakdown phase of the HiPIMS pulse and becomes significant (but never dominating) only later in the pulse. For the sputtered species, Penning ionization can be a significant ionization mechanism in the dcMS discharges, while in the HiPIMS discharge Penning ionization is always negligible as compared to electron impact ionization. The main reasons for these differences are a higher plasma density in the HiPIMS discharge, and a higher electron temperature. Furthermore, we explore the ionization fraction and the ionized flux fraction of the sputtered vapor and compare with recent experimental work.
Ämnesord
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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