Stabilization of liquified-inert-gas jets for laser-plasma generation

(creator_code:org_t)

AIP Publishing, 2004
2004
Engelska.
Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 95:8, s. 4432-4437

Relaterad länk:: https://urn.kb.se/re...; visa fler...; https://doi.org/10.1...; visa färre...

Abstract Ämnesord

Stäng

We investigate the hydrodynamic properties of liquified-inert-gas jets in a vacuum with a special emphasis on their stability. Such jets have applications as targets for laser-plasma generation of soft-x-ray and extreme-ultraviolet (EUV) radiation. An important example is the liquid-xenon-jet laser-plasma source, one of the source candidates for EUV lithography. A simple hydrodynamic model in not sufficient to explain experimental observations of jet stability. Evaporation-induced cooling explains observed in-flight freezing of the jet and may be a key factor influencing jet stability. It is shown how the jet stability, and, thus, the stability of the laser-plasma x-ray and EUV emission, are improved by applying localized heating to the tip of the jet-generating nozzle.

Av författaren/redakt...: Hansson, Björn; Berglund, Magnus; Hemberg, Oscar; Hertz, Hans M.

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