A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling and phase

Nguyen, Chris Phong Van (author)

Takabayashi, Alain Yuji (author)

Errando-Herranz, Carlos (author)

Antony, Cleitus (author)

Talli, Giuseppe (author)

Verheyen, Peter (author)

Khan, Umar (author)

Bogaerts, Wim (author)

Quack, Niels (author)

(creator_code:org_t)

Abstract Subject headings

Ring resonators are a vital element for designing filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption and good optical performance are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of coupling and round-trip phase using low-power microelectromechanical (MEMS) actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable long-term operation with low damping. On resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4V and a peak drive amplitude as low as 20mV.

By the author/editor: Edinger, Pierre; Jo, Gaehun, 1992 ...; Nguyen, Chris Ph ...; Takabayashi, Ala ...; Errando-Herranz, ...; Antony, Cleitus; show more...; Talli, Giuseppe; Verheyen, Peter; Khan, Umar; Bleiker, Simon J ...; Bogaerts, Wim; Quack, Niels; Niklaus, Frank, ...; Gylfason, Kristi ...; show less...

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

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