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Vacuum-sealed silic...
Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
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- Edinger, Pierre (author)
- KTH,Mikro- och nanosystemteknik
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- Jo, Gaehun, 1992- (author)
- KTH,Mikro- och nanosystemteknik
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- Van Nguyen, Chris Phong (author)
- KTH
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- Takabayashi, Alain Yuji (author)
- Ecole Polytech Fed Lausanne, CM 1 364 Ctr Midi,Stn 10, CH-1015 Lausanne, Switzerland.
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- Errando-Herranz, Carlos, 1989- (author)
- KTH,Mikro- och nanosystemteknik
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- Antony, Cleitus (author)
- Tyndall Natl Inst Technol, Lee Maltings Complex Dyke Parade, Cork T12 R5CP, Ireland.
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- Talli, Giuseppe (author)
- Tyndall Natl Inst Technol, Lee Maltings Complex Dyke Parade, Cork T12 R5CP, Ireland.
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- Verheyen, Peter (author)
- Interuniv Microelect Ctr, IMEC, 1 Postbus,Kapeldreef 75, B-3001 Leuven, Belgium.
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- Khan, Umar (author)
- Interuniv Microelect Ctr, IMEC, 1 Postbus,Kapeldreef 75, B-3001 Leuven, Belgium.;Univ Ghent, Dept Informat Technol, IMEC, Technologiepark Zwijnaarde 126, B-9052 Ghent, Belgium.
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- Bleiker, Simon J. (author)
- KTH,Mikro- och nanosystemteknik
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- Bogaerts, Wim (author)
- Interuniv Microelect Ctr, IMEC, 1 Postbus,Kapeldreef 75, B-3001 Leuven, Belgium.;Univ Ghent, Dept Informat Technol, IMEC, Technologiepark Zwijnaarde 126, B-9052 Ghent, Belgium.
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- Quack, Niels (author)
- Ecole Polytech Fed Lausanne, CM 1 364 Ctr Midi,Stn 10, CH-1015 Lausanne, Switzerland.;Univ Sydney, J07-90 Carillon Ave, Newtown, NSW 2042, Australia.
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- Niklaus, Frank, 1971- (author)
- KTH,Mikro- och nanosystemteknik
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- Gylfason, Kristinn, 1978- (author)
- KTH,Mikro- och nanosystemteknik
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(creator_code:org_t)
- Optica Publishing Group, 2023
- 2023
- English.
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In: Optics Express. - : Optica Publishing Group. - 1094-4087. ; 31:4, s. 6540-6551
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
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- Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Edinger, Pierre
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Jo, Gaehun, 1992 ...
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Van Nguyen, Chri ...
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Takabayashi, Ala ...
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Errando-Herranz, ...
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Antony, Cleitus
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show more...
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Talli, Giuseppe
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Verheyen, Peter
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Khan, Umar
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Bleiker, Simon J ...
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Bogaerts, Wim
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Quack, Niels
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Niklaus, Frank, ...
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Gylfason, Kristi ...
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- About the subject
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- ENGINEERING AND TECHNOLOGY
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ENGINEERING AND ...
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and Electrical Engin ...
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and Other Electrical ...
- Articles in the publication
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Optics Express
- By the university
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Royal Institute of Technology