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An Electron Beam Heated Evaporation Source
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- Magnuson, Martin, 1965- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Department of Physics, Uppsala University, Box 530, S-75121 Uppsala, Sweden
- (creator_code:org_t)
- Uppsala : Uppsala universitet, 1994
- English 4 s.
- Reports (other academic/artistic)
Abstract
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- An electron beam evaporator has been assembled, tested and used for deposition of thin nickel films. Flux and deposition rates has been measured with an oscillating quartz crystal monitor (QCM), an ion sensor wire, and visible deposition on a mirror on front of the evaporator. A thin nickel rod of 2 mm diameter was found to improve the pressure in comparison to a 6-mm nickel rod. The flux was typically 3-4 Angstroms per minute during the test, but other flux rates can easily be achieved by changing the filament current and the acceleration voltage.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Metallurgi och metalliska material (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Metallurgy and Metallic Materials (hsv//eng)
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