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High quality 6H-SiC (0001) homoepitaxial layers as substrate surface for growth of AlN epitaxial layers
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- Hallin, Christer, 1963- (author)
- Linköpings universitet,Tekniska högskolan,Institutionen för fysik, kemi och biologi
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- Kakanakova-Georgieva, Anelia, 1970- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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- Persson, Per, 1971- (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- (creator_code:org_t)
- 2005
- 2005
- English.
- In: physica status solidi C, Vol. 2. ; , s. 2109-2112
- Conference paper (peer-reviewed)
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- NATURAL SCIENCES
- NATURVETENSKAP
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- ref (subject category)
- kon (subject category)
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- Linköping University
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