Search: id:"swepub:oai:DiVA.org:liu-41964" >
Contact-Less Electr...
Contact-Less Electrical Defect Characterization of Semi-Insulating 6H-SiC Bulk Material
-
Hahn, S. (author)
-
- Beyer, Franziska, 1980- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
- Gällström, Andreas, 1978- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
show more...
-
- Carlsson, Patrick, 1975- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
- Henry, Anne, 1959- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
- Magnusson, Björn, 1970- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
Niklas, J. (author)
-
- Janzén, Erik, 1954- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
show less...
-
(creator_code:org_t)
- Trans Tech Publications, 2009
- 2009
- English.
-
In: Materials Science Forum Vols. 600-603. - : Trans Tech Publications. ; , s. 405-408
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://doi.org/10.4...
-
show less...
Abstract
Subject headings
Close
- The novel technique microwave detected photo induced current transient spectroscopy (MD-PICTS) was applied to semi-insulating 6H-SiC in order to investigate the properties of inherent defect levels. Defect spectra can be obtained in the similar way to conventional PICTS and DLTS. However, there is no need for contacting the samples, which allows for non-destructive and spatially resolved electrical characterization. This work is focused on the investigation of semi-insulating 6H-SiC grown under different C/Si-ratios. In the corresponding MD-PICTS spectra several shallow defect levels appear in the low temperature range. However the peak assignment needs further investigation. Additionally different trap reemission dynamics are obtained for higher temperatures, which are supposed to be due to different compensation effects.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- NATURAL SCIENCES
- NATURVETENSKAP
- Semiconductor physics
- Halvledarfysik
Publication and Content Type
- ref (subject category)
- kon (subject category)
To the university's database
- By the author/editor
-
Hahn, S.
-
Beyer, Franziska ...
-
Gällström, Andre ...
-
Carlsson, Patric ...
-
Henry, Anne, 195 ...
-
Magnusson, Björn ...
-
show more...
-
Niklas, J.
-
Janzén, Erik, 19 ...
-
show less...
- About the subject
-
- NATURAL SCIENCES
-
NATURAL SCIENCES
-
and Physical Science ...
-
and Condensed Matter ...
- Articles in the publication
- Materials Scienc ...
- By the university
-
Linköping University