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Development of an infrared thermopile detector with a thin self-supporting SU-8 membrane
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- Mattsson, Claes (author)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013),Electronics design division, STC
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- Thungström, Göran (author)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
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- Bertilsson, Kent (author)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
- show more...
- Martin, Hans (author)
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- (creator_code:org_t)
- New York : IEEE conference proceedings, 2007
- 2007
- English.
- In: Proceedings of IEEE Sensors. - New York : IEEE conference proceedings. - 9781424412624 ; , s. 836-839
- Conference paper (peer-reviewed)
Abstract
Subject headings
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- In this paper we present the development and characterization of thermopile detector on a 4 mum thin self-supporting membrane made of the epoxy based photoresist SU-8. The membrane is realized using silicon bulk micromachining techniques. In many existing thermopile detectors, a temperature difference over the thermocouple junctions is achieved by connecting a thin membrane of either Si or Si3N4 to a silicon bulk. These materials suffer from relatively high thermal conductivity, which lowers the sensitivity of the detector. A material such as SU-8 has much lower thermal conductivity and is applied using standard photolithographic processing steps. Simulation results are presented which verifies SU-8 as a better choice than Si and Si3N4 when used as thermal insulating membrane in a thermopile detector. A thermopile consisting of 196 series coupled Ti/Ni thermocouples has been fabricated. Results from measurements are presented, showing a sensitivity of 5.6 V/W and a noise equivalent power (NEP) of 9.9 nW/radicHz.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Thermopile
- SU-8
- IR
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publication and Content Type
- ref (subject category)
- kon (subject category)
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