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A Test Facility for micro Machining and Other Applications of Ion-assisted Etching Technology
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- Westerberg, Lars (author)
- Uppsala universitet,The Svedberg-laboratoriet
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- Nilsson, Leif (author)
- Uppsala universitet,Institutionen för materialvetenskap
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- van Veldhuizen, Elbert Jan (author)
- Uppsala universitet,Fysiska institutionen
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- Romanski, Jan (author)
- Ziemann, Volker (author)
- Hjort, Klas (author)
- Granqvist, Claes-Göran (author)
- Nordgren, Joseph (author)
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- (creator_code:org_t)
- 1996
- 1996
- English.
- In: Abstract Book of the Tenth Int. Conf.on Thin Films.
- Conference paper (other academic/artistic)
Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
Keyword
- Materials science
- Teknisk materialvetenskap
Publication and Content Type
- vet (subject category)
- kon (subject category)
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- Nilsson, Leif
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- Ziemann, Volker
- Hjort, Klas
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- Nordgren, Joseph
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- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
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- Uppsala University
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