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Corundum-structured AlCrNbTi oxide film grown using high-energy early-arriving ion irradiation in high-power impulse magnetron sputtering

Du, Hao (author)
Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten,Guizhou Univ, Peoples R China; Guizhou Univ, Peoples R China
Shu, Rui (author)
Linköpings universitet,Laboratoriet för organisk elektronik,Tekniska fakulteten
Boyd, Robert (author)
Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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Le Febvrier, Arnaud (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
Sortica, Mauricio A. (author)
Uppsala universitet,Tandemlaboratoriet,Uppsala Univ, Sweden
Primetzhofer, Daniel (author)
Uppsala universitet,Tillämpad kärnfysik,Tandemlaboratoriet,Uppsala Univ, Sweden; Uppsala Univ, Sweden
Helmersson, Ulf (author)
Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
Eklund, Per (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
Lundin, Daniel (author)
Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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 (creator_code:org_t)
Elsevier, 2023
2023
English.
In: Scripta Materialia. - : Elsevier. - 1359-6462 .- 1872-8456. ; 234
Related links:
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  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Multicomponent or high-entropy oxide films are of interest due to their remarkable structure and properties. Here, energetic ion irradiation is utilized for controlling the phase formation and structure of AlCrNbTi oxide at growth temperature of 500 degrees C. The ion acceleration is achieved by using a high-power impulse magnetron sputtering (HiPIMS) discharge, accompanied by a 10 & mu;s-long synchronized substrate bias (Usync), to minimize the surface charging effect and accelerate early-arriving ions, mainly Al+, O+, Ar2+, and Al2+. By increasing the magnitude of Usync from-100 V to-500 V, the film structure changes from amorphous to single-phase corundum, followed by the formation of high-number-density stacking faults (or nanotwins) at Usync =-500 V. This approach paves the way to tailor the high-temperature-phase and defect formation of oxide films at low growth temperature, with prospects for use in protective-coating and dielectric applications.

Subject headings

NATURVETENSKAP  -- Kemi -- Materialkemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Materials Chemistry (hsv//eng)
NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Keyword

High -entropy oxides
HiPIMS
Ion bombardment
Corundum structure
Nanotwin

Publication and Content Type

ref (subject category)
art (subject category)

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