Sökning: id:"swepub:oai:gup.ub.gu.se/61251" >
Surface nanostructu...
Surface nanostructuring by implantation of cluster ions
-
- Popok, Vladimir, 1966 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Prasalovich, Sergei, 1976 (författare)
- Gothenburg University,Göteborgs universitet,Institutionen för fysik (GU),Department of Physics (GU),University of Gothenburg
-
- Campbell, Eleanor E B, 1960 (författare)
- Gothenburg University,Göteborgs universitet,Institutionen för fysik (GU),Department of Physics (GU),University of Gothenburg
-
(creator_code:org_t)
- Elsevier BV, 2004
- 2004
- Engelska.
-
Ingår i: Vacuum. - : Elsevier BV. - 0042-207X. ; 76:2-3, s. 265-272
- Relaterad länk:
-
https://gup.ub.gu.se...
-
visa fler...
-
https://doi.org/10.1...
-
https://research.cha...
-
https://research.cha...
-
visa färre...
Abstract
Ämnesord
Stäng
- A brief state-of-the-art review in the field of cluster ion implantation is presented. Ionised cluster beams are considered as a controllable and versatile tool for modification and processing of surfaces and near-surface layers on an atomistic scale as an alternative to ion implantation and ion assisted deposition. The main effects occurring under cluster-surface collisions as well as advantages in the application of cluster ion beams are reviewed. The problem of surface erosion under impact of energetic cluster ions is emphasised in the paper. A model explaining crater and hillock formation on target surfaces with relation to the thermal-transfer effect and local target melting at the collision spot is discussed.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- cluster ion implantation
- cluster-surface collision
- crater
- hillock
- hillock
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
-
Vacuum
(Sök värdpublikationen i LIBRIS)
Till lärosätets databas